遠程電漿輔助原子層沉積技術用於低溫製備奈米鐵電薄膜及其鐵電相結晶行為之研究

Project title

遠程電漿輔助原子層沉積技術用於低溫製備奈米鐵電薄膜及其鐵電相結晶行為之研究

Internal ID

106-2221-E-002-086-MY2

Principal Investigator

TZONG-LIN JAY SHIEH

Start Date

August 1, 2018

End Date

July 31, 2019

Partner Organizations

National Science and Technology Council