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.National Taiwan University / 國立臺灣大學
Project / 研究計畫
遠程電漿輔助原子層沉積技術用於低溫製備奈米鐵電薄膜及其鐵電相結晶行為之研究
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遠程電漿輔助原子層沉積技術用於低溫製備奈米鐵電薄膜及其鐵電相結晶行為之研究
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Primary Data
Project title
遠程電漿輔助原子層沉積技術用於低溫製備奈米鐵電薄膜及其鐵電相結晶行為之研究
Internal ID
106-2221-E-002-086-MY2
Principal Investigator
TZONG-LIN JAY SHIEH
Start Date
August 1, 2018
End Date
July 31, 2019
Partner Organizations
National Science and Technology Council