可供四吋到八吋及破片作晶圓鍵結之快熱製程機台(III)

Project title

可供四吋到八吋及破片作晶圓鍵結之快熱製程機台(III)

Internal ID

94-2623-7-002-020-AT

Principal Investigator

Start Date

January 1, 2005

End Date

December 31, 2005

Partner Organizations

National Science and Technology Council