Project title
IC封測顯微自動化光學檢測設備與關鍵技術之研發
Internal ID
101R7104
Principal Investigator
Start Date
August 1, 2012
End Date
December 31, 2012
Partner Organizations
IC封測顯微自動化光學檢測設備與關鍵技術之研發
Keywords
自動化光學檢測(AOI)
晶圓量測
光學檢測
自動化
光機電系統整合
Automatic optical inspection (AOI)
Automation
semiconductor wafer measurement
Opto-mechatronics
In-situ optical measurement.