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.National Taiwan University / 國立臺灣大學
Project / 研究計畫
超高速超大型積體電路光刻製程模擬及全焦段光罩校正及平行化
超高速超大型積體電路光刻製程模擬及全焦段光罩校正及平行化
Details
Primary Data
Project title
超高速超大型積體電路光刻製程模擬及全焦段光罩校正及平行化
Internal ID
99-2221-E-002-200-MY3
Principal Investigator
CHUNG-PING CHEN
Start Date
August 1, 2011
End Date
July 31, 2012
Partner Organizations
National Science and Technology Council