Internal ID
113-2218-E-002-046-
Principal Investigator
Start Date
June 1, 2024
End Date
May 31, 2025
Organizations
Partner Organizations
半導體先進封裝製程之線上智能化AOI關鍵檢測技術與虛實整合系統研發-半導體先進封裝製程之線上智能化AOI關鍵檢測技術與虛實整合系統研發(4/4)
Keywords
Precision Metrology
Automated Optical Inspection (AOI)
Wafer Inspection
Advanced Semiconductor Manufacturing Processes
Intelligent Inspection
Virtual Measurement (VM).