創新式全域高速彩色共焦量測探頭關鍵技術之研發與零阿倍三軸晶圓掃描平台之整合系統及最佳化

Project title

創新式全域高速彩色共焦量測探頭關鍵技術之研發與零阿倍三軸晶圓掃描平台之整合系統及最佳化

Internal ID

110-2221-E-002-120-MY3

Principal Investigator

LIANG-CHIA CHEN

Start Date

August 1, 2022

End Date

July 31, 2023

Organizations

Mechanical Engineering

Partner Organizations

National Science and Technology Council