Project title
創新式光學共焦微凸塊三維全域形貌量測系統與關鍵技術之研發(2/2)
Internal ID
107-2622-E-002-005-CC2(企業培育專案-科技部追加款)
Principal Investigator
Start Date
November 1, 2018
End Date
May 31, 2019
Organizations
Partner Organizations
創新式光學共焦微凸塊三維全域形貌量測系統與關鍵技術之研發(2/2)
Keywords
自動化光學檢測 (AOI)
光學量測
形貌量測
半導體製程
共焦顯微術
Automated optical inspection (AOI)
optical measurement
surface profilometry
semiconductor manufacturing processes
confocal microscopy