應用於半間距11奈米及以下製程世代多閘式電晶體之奈米微影成像度增進及非矩形元件快速模擬技術

Project title

應用於半間距11奈米及以下製程世代多閘式電晶體之奈米微影成像度增進及非矩形元件快速模擬技術

Internal ID

103-2221-E-002-261-MY3

Principal Investigator

Start Date

August 1, 2015

End Date

July 31, 2016

Partner Organizations

National Science and Technology Council