運用於高速原子力顯微術之掃描致動器之主動式抗振盪方法

Project title

運用於高速原子力顯微術之掃描致動器之主動式抗振盪方法

Internal ID

106-2221-E-002-116-

Principal Investigator

KUANG-YUH HUANG

Start Date

August 1, 2017

End Date

July 31, 2018

Partner Organizations

National Science and Technology Council