晶圓檢測精密量測平台與關鍵光學量測探頭之研發(4/4)

Project title

晶圓檢測精密量測平台與關鍵光學量測探頭之研發(4/4)

Internal ID

107-2218-E-002-002-

Principal Investigator

LIANG-CHIA CHEN

Start Date

October 1, 2018

End Date

September 30, 2019

Organizations

Mechanical Engineering

Partner Organizations

National Science and Technology Council