運用模板合成法製備中孔洞型低介電常數二氧化矽

Project title

運用模板合成法製備中孔洞型低介電常數二氧化矽

Internal ID

101-2923-E-002-013-MY3

Principal Investigator

Start Date

January 1, 2012

End Date

December 31, 2012

Partner Organizations

National Science and Technology Council