應用於11奈米及以下半間距製程世代多閘式電晶體之奈米微影成像度增進及非矩形元件快速模擬技術(I)

Project title

應用於11奈米及以下半間距製程世代多閘式電晶體之奈米微影成像度增進及非矩形元件快速模擬技術(I)

Internal ID

101-2221-E-002-206-

Principal Investigator

Start Date

August 1, 2012

End Date

July 31, 2013

Partner Organizations

National Science and Technology Council