可供四吋到八吋及破片作晶圓鍵結之快熱製程機台(Ⅱ)

Project title

可供四吋到八吋及破片作晶圓鍵結之快熱製程機台(Ⅱ)

Internal ID

93-AT-7-002-001-

Principal Investigator

Start Date

January 1, 2004

End Date

December 31, 2004

Partner Organizations

National Science and Technology Council