提升先進製程微影解析度之多重圖案微影製程佈局拆解與修正最佳化

Project title

提升先進製程微影解析度之多重圖案微影製程佈局拆解與修正最佳化

Internal ID

106-2628-E-002-019-MY3

Principal Investigator

Start Date

August 1, 2017

End Date

July 31, 2018

Partner Organizations

National Science and Technology Council