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.National Taiwan University / 國立臺灣大學
Project / 研究計畫
半間距22奈米以下技術節點前瞻非化學放大式分子光阻之鄰近效應建模與運用
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半間距22奈米以下技術節點前瞻非化學放大式分子光阻之鄰近效應建模與運用
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Primary Data
Project title
半間距22奈米以下技術節點前瞻非化學放大式分子光阻之鄰近效應建模與運用
Internal ID
104-2923-E-002-007-MY3
Principal Investigator
KUEN-YU TSAI
Start Date
August 1, 2016
End Date
July 31, 2017
Partner Organizations
National Science and Technology Council