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.National Taiwan University / 國立臺灣大學
Project / 研究計畫
以波帶片陣列為基礎之極紫外光直寫微影系統之研發-子計畫三:直寫式極紫外光微影系統快門製作與系統整合
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以波帶片陣列為基礎之極紫外光直寫微影系統之研發-子計畫三:直寫式極紫外光微影系統快門製作與系統整合
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Primary Data
Project title
以波帶片陣列為基礎之極紫外光直寫微影系統之研發-子計畫三:直寫式極紫外光微影系統快門製作與系統整合
Internal ID
98-2221-E-002-165-MY3
Principal Investigator
JIA-YUSH YEN
Start Date
August 1, 2010
End Date
July 31, 2011
Partner Organizations
National Science and Technology Council