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.National Taiwan University / 國立臺灣大學
Project / 研究計畫
電化學輔助之化學機械研磨銅與低應力化學機械研磨阻障層的研究(II)
電化學輔助之化學機械研磨銅與低應力化學機械研磨阻障層的研究(II)
Details
Primary Data
Project title
電化學輔助之化學機械研磨銅與低應力化學機械研磨阻障層的研究(II)
Internal ID
99-2221-E-002-181-MY2
Principal Investigator
SHI-CHERN YEN
Start Date
August 1, 2011
End Date
July 31, 2012
Partner Organizations
National Science and Technology Council