Research on the positioning control of a co-planar stage embedded with an ultrasonic motor
Date Issued
2008
Date
2008
Author(s)
Sun, Shi-Hao
Abstract
Abstracts electronic semiconductor industry is booming, precision positioning is getting more and more attention. In order to achieve precise positions on submicrometer/nanometer levels, piezoelectric material becomes mechanism designer''s first choice. As a result, the piezoelectric material becomes more and more valuable.owever Piezoelectric Material has a problem that it could not reach long distance and precision positing at the same time. Therefore, mechanism designer mostly use long range moving stage to combine piezoelectric material to achieve precision positing.he co-planar using ultrasonic motor as the actuator is made from NTU. Its bending mode can reach long range driving distance; and its longitudinal mode accomplishes precision positing. By using ultrasonic motor as the actuator, stage mechanism is simplified and positioning accuracy is improved.his research proposes a PC-Based positioning system with BCB (Borland C++ Builder) software and DAQ (Data Acquisition) Device on the co-planar stage. On varied friction, we use self-tuning neuro-PID controller to control velocity to achieve the demand of nano positioning control.eywords： Ultrasonic Motor, Co-planar, Self-tuning Neuro-PID Controller
Subjects
Ultrasonic Motor
Co-planar
Self-tuning Neuro-PID Controller
Type
thesis
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ntu-97-R95522827-1.pdf
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