Vertical micromirrors integrated with electromagnetic microactuators for two-dimensional optical matrix switches
Resource
IEEE Photonics Technology Letters 17 (9): 1860-1862
Journal
IEEE Photonics Technology Letters
Journal Volume
17
Journal Issue
9
Pages
1860-1862
Date Issued
2005
Author(s)
Abstract
We report novel single crystalline silicon (SCS) micromirrors vertically attached to electromagnetic microactuators for the two-dimensional (2-D) free-space optical cross-connect switching application. The operation voltage is typically 0.7 V due to the large electromagnetic force generated by the coils on the microactuators. Vertical micromirrors with the surface area of 500 × 1200 μm are monolithically integrated with microactuators. The micromirrors are fabricated by low-cost tetra-methyl ammonium hydroxide anisotropic wet etching on the (110) SCS wafers. The surface roughness of the micromirror is less than 20 nm and the measured insertion loss caused by the micromirror is approximately 0.2 dB. The large surface area of the micromirror can accommodate a big optical beam for 2-D matrix configuration to minimize insertion loss. Chips consisting of 10 × 10 arrays are successfully fabricated and tested. © 2005 IEEE.
Subjects
Electromagnetic force; Free space; Low voltage; Optical cross-connect switches; Optical microelectromechanical systems (MEMS); Vertical micromirrors
Other Subjects
Electric potential; Insertion losses; Microactuators; Microelectromechanical devices; Mirrors; Semiconducting silicon; Single crystals; Electromagnetic force; Optical cross connect switches; Optical microelectromechanical systems (MEMS); Vertical micromirrors; Optical switches
Type
journal article