Novel GaAs Metal–Semiconductor Field-Effect Transistors with InGaP/GaAs Multiple Quantum Barrier Capping and Buffer Layers
Resource
Jpn. J. Appl. Phys. Vol. 41 (2002) pp. 5937–5940
Part 1, No. 10, October 2002
Part 1, No. 10, October 2002
Journal
Japanese Journal of Applied Physics
Journal Issue
No. 10
Pages
-
Date Issued
2002-10
Date
2002-10
Author(s)
DOI
246246/200611150121950
Abstract
We present a novel GaAs metal–semiconductor field-effect transistor (MESFET) with InGaP/GaAs multiple quantum barrier
(MQB) capping and buffer layers. The MQB structure with (29; 6, 5, 7; 8, 8, 1; 6, 5, 7; 29) periodic stacks was designed to
increase effective-potential-barrier height. We demonstrate that, by using the InGaP/GaAs MQB capping layer, the gate
Schottky barrier performance and gate leakage current are improved.
(MQB) capping and buffer layers. The MQB structure with (29; 6, 5, 7; 8, 8, 1; 6, 5, 7; 29) periodic stacks was designed to
increase effective-potential-barrier height. We demonstrate that, by using the InGaP/GaAs MQB capping layer, the gate
Schottky barrier performance and gate leakage current are improved.
Subjects
GaAs MESFETs, InGaP/GaAs multiple quantum barrier
Schottky barrier
semiconductor device fabrication
Publisher
Taipei:National Taiwan University Dept Chem Engn
Type
journal article
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