Design and Analysis of Metal Thin-Film Ignition Chip
Date Issued
2004
Date
2004
Author(s)
Qiu, Hong-Sheng
DOI
zh-TW
Abstract
Micro Electromechanical Technology has made great progress，using the Process-skill to manufacture Electrical-Igniting-Chip to replace an old Exploding-Bridge-Wire，Electrical-Igniting-Chip has the advantage of lower firing energy、shorter ignition time、higher exploding temperature, etc. To switch an air bag of cars，to ignite bombs and rockets，to burn blunt master explosive，to ignite fuel to push ahead and is a kind of more reliable product. When it is an military use，it is set on an
ignition device which has the ignition powder Zr in it ,and the Exploding Bridge Wire must pass the military standard of low firing energy test、low ignition time test、avoiding electrostatic discharge test and avoiding electromagnetic disturbing.
In the manufacture of semiconductor process,use the process of yallow light、the process of thin film、the process of lift off to manufacture the Exploding Bridge Wire. And have successfully manufacture the golden Exploding Bridge Wire, the size of it is 30μm in wedth and 600μm in lenth. The single Exploding Bridge Wire is single or is parallel connection of two、three and four Exploding Bridge Wire,and each resistences is about 14Ω、7Ω、4.5Ω、3Ω.
In the respect of firing energy and ignition time, this paper use the idea of mathematical method, use the formulas for Electrical Gurney Energy and Electrical Heat to analyse the ignition time、firing energy and exploding temperature of ten kind of metal of the every Exploding Bridge Wire size. Change the parameter of RCL discharge system to get the numerical solution, from the solution to find the material and size of low firing energy and high exploding temperature, and it is a reverse engineering.
In the respect of avoiding electrostatic discharge causing the accident of ignition of Zr , use the Zenor diode of backward direction and RC discharge circuit , the discharged
current of low voltage of capacitance doesn’t pass the RC element connected to ground terminal, and ignite the Exploding Bridge Wire. Thousands of electrostatic voltage break down the zenor diode of backward direction , and electrostatic voltage discharge in Exploding Bridge Wire in nano seconds to avoid electrostatic voltage igniting. We analyse the electrostatic voltage discharge in 1 sec by using the numerical method,to caculate the time constant of RC circuit. It shows that the time constant of RC circuit should be about 0.26 nano second to satisfy both conditions, the temperature of Exploding Bridge Wire is lower than the ignition temperature of the powder of Zr, which is 300℃, and the voltage of Exploding Bridge Wire is lower than the military standard of the safe electrostatic voltage .
Subjects
微機電
引燃器
電橋
晶片
MEMS
Igniter
Bridge wire
chip
Type
thesis