Chromatic confocal surface profilometry employing signal recovering methodology for simultaneously resolving lateral and axial cross talk problems

Journal

Proceedings of SPIE - The International Society for Optical Engineering

Journal Volume

8759

Date Issued

2013

Author(s)

Chen, L.-C.

Lin, T.-Y.

Chang, Y.-W.

Lin, S.-T.

LIANG-CHIA CHEN

DOI

10.1117/12.2015102

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/447849

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-84875960419&doi=10.1117%2f12.2015102&partnerID=40&md5=673a5ff083d94be4155005e8033d8205

Type

conference paper