Rapid fabrication of ultraviolet-cured polymer microlens arrays by soft roller stamping process

Resource

Microelectronic Engineering 84 (2): 355-361

Journal

Microelectronic Engineering

Journal Volume

84

Journal Issue

2

Pages

355-361

Date Issued

2007-02

Date

2007-02

Author(s)

Chang, Chih-Yuan

Chu, Ming-Hui

URI

Type

journal article

File(s)

Name

03.pdf

Size

1.53 MB

Format

Adobe PDF

Checksum

(MD5):a56ba10acff5f1a8c176c63d2bfdcf8e