Composition control of r.f.-sputtered Ni2MnGa thin films using optical emission spectroscopy

Journal

Materials Transactions

Journal Volume

43

Journal Issue

5

Pages

871-875

Date Issued

2002

Author(s)

Wu, S.-K.

Tseng, K.-H.

URI

http://www.scopus.com/inward/record.url?eid=2-s2.0-0036577895&partnerID=MN8TOARS

http://scholars.lib.ntu.edu.tw/handle/123456789/296860

Type

journal article