An electro-magnetic micromachined actuator monolithically integrated with a vertical shutter for variable optical attenuation

Journal

Journal of Micromechanics and Microengineering

Journal Volume

18

Journal Issue

7

Date Issued

2008

Author(s)

Hung, S.H.

Hsieh, H.-T.

GUO-DUNG JOHN SU

DOI

10.1088/0960-1317/18/7/075003

URI

http://www.scopus.com/inward/record.url?eid=2-s2.0-47249129342&partnerID=MN8TOARS

http://scholars.lib.ntu.edu.tw/handle/123456789/340731

Type

journal article