A low-power low-phase-noise LC VCO with MEMS cu inductors
Journal
IEEE Microwave and Wireless Components Letters
Journal Volume
15
Journal Issue
6
Pages
434-436
Date Issued
2005
Author(s)
Chen, Hsiao-Chin
Chien, Chao-Heng
Chiu, Hung-Wei
Chang, Kung-Neng
Chen, Kun-Yu
Chen, Shi-Hao
Abstract
A 2-3 GHz CMOS inductance-capacitance (LC) voltage-controlled oscillator (VCO) integrated with high-Q micro-electromechanical systems (MEMS) Cu inductors is reported. While dissipating only 6.3 mW, a phase noise of -121 dBc/Hz at 600 kHz offset from 2.78 GHz carrier is achieved. This MEMS VCO has the largest power-frequency normalized figure-of-merit (12.5 dB) among the Si bipolar and CMOS LC VCOs.
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Type
journal article
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