Double-patterning aware DSA template guided cut redistribution for advanced 1-D gridded designs
Journal
International Symposium on Physical Design
Journal Volume
03-06-April-2016
Pages
47-54
Date Issued
2016
Author(s)
Lin, Z.-W.
Abstract
Directed self-assembly (DSA) technology has emerged as a promising candidate for cut printing in advanced 1-D gridded layouts, where cuts might need to be redistributed such that they can be patterned by specific DSA guiding templates. The cut redistribution significantly affects the performance and manufacturability of a circuit. In this paper, we propose an algorithm incorporating DSA with double patterning for a template guided cut redistribution problem. We first develop a linear-time optimal algorithm for a special case of the template guided cut redistribution problem, with contiguous rows. For the general problem, a linear-time double-patterning aware partitioning method is developed to select a set of subproblem candidates to generate a template distribution to minimize the impact on circuit performance and manufacturing. Consequently, we decompose a general problem into a set of subproblems conforming to the aforementioned special case, solve each subproblem optimally, and merge the solutions to the subproblems to obtain an overall solution to the general one. Experimental results show that our algorithm can resolve all spacing rule violations, with even smaller extended wire costs and running times, compared with the state-of-the-art works on a set of common benchmarks.
Type
conference paper