Integrating Production Scheduling and Maintenance -Ion Implantation Area Scheduling
Date Issued
2010
Date
2010
Author(s)
Wang, I-Ping
Abstract
Ion implant area is one of the most important processes in semiconductor fabrication industry. The characteristic of this area is that the sequence for different kind of WIP type would affect the variation of machine failure rate.This means the scheduling decision making is just machine maintainance work. Many companies only pursue production efficiency but ignore the importance of maintainance work.We should integrate them simultaneously, early timing for maitainance work would increase machine program setup-change-over time. On the contrary, late timing for maintainance work require long machine repair time penalty. In conclusion, integrating both is the urgent decision for high technology to execute .
The research goal is first to construct the unique reliability mode for the machine, comparing scheduling methods based on two kinds of risk manner.Second,analysis the optimal scheduling trend for two kind of WIP type workloads . Finally,to compare two scheduling methods whether concerns about maintaince work or not,suggesting the the most robust one for enterprises, and provides optimal job type-mix arrivals for cross-area integration.
The contributions of this research are that we find an optimal scheduling pattern for ion implant area, when the difference between two kind of WIP type workloads is large ,optimal sequence will keep the failure rate in a low level , but increase in the end .From this trend ,we get the optimal job type-mix arrival that every type WIP comes evenly.Besides,when the ratio of machine repair time and setup change-over time is lagre in the NIPM system, we suggest to choose the method that integrate production efficiency and machine maintainance work simultaneously.
Subjects
Machine scheduling
production and maintenance scheduling
ion implantation
semiconductor manufacturing
reliability
failure rate
Type
thesis
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