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College of Electrical Engineering and Computer Science / 電機資訊學院
Electrical Engineering / 電機工程學系
PHOMAG: a photolithography machine allocation game
Details
PHOMAG: a photolithography machine allocation game
Resource
Semiconductor Manufacturing Conference Proceedings, 1997 IEEE International Symposium on
Journal
Semiconductor Manufacturing Conference Proceedings, 1997 IEEE International Symposium on
Pages
-
Date Issued
1997-10
Date
1997-10
Author(s)
Chang, Shi-Chung
Liu, Chung-Yang
Hu, Ming-Der
Wu, Hsin-Yi
Wu, Hsin-Chen
Chao, Cheng-Lin
Chen, Ren-Cheng
DOI
10.1109/ISSM.1997.664607
DOI
N/A
URI
http://ntur.lib.ntu.edu.tw//handle/246246/2007041910031874
Type
journal article
File(s)
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Name
00664607.pdf
Size
291.25 KB
Format
Adobe PDF
Checksum
(MD5):31d2d66234f2336c594ca7f2a3397258
