Formation of Nano-Size SiO2 Thin Film on an Aluminum Plate with Hexamethyldisilazane (HMDSA) and Hexamethyldisiloxane (HMDSO)
Resource
Journal of Combustion and Plasmochemistry 1 (3): 253-263
Journal
Journal of Combustion and Plasmochemistry
Journal Volume
1
Journal Issue
3
Pages
253-263
Date Issued
2003
Date
2003
Author(s)
Ma, H. K.
Zhao, E.
Yeh, C. L.
Chung, K. M.
Type
journal article