Application of soft landing to the process control of chemical mechanical polishing

Resource

Microelectronic Engineering 65 (3): 345-356

Journal

Microelectronic Engineering

Journal Volume

65

Journal Issue

3

Pages

345-356

Date Issued

2003

Date

2003

Author(s)

Chiu, Jian-Bin

Yu, Cheng-Ching

Shen, Shih-Haur

URI

Type

journal article

File(s)

Name

36.pdf

Size

1.08 MB

Format

Adobe PDF

Checksum

(MD5):7dc5bcb02ff025e7f8afab956c65a756