Fabrication of Wide-Angle Optical Power Splitter Using Benzocyclebutene Waveguide with Simplified Coherently-Coupled Segments
Date Issued
2007
Date
2007
Author(s)
Ni, Chi-Li
DOI
zh-TW
Abstract
Benzocyclobutene (BCB) optical waveguide devices fabricated by 248 nm krypton fluorine excimer laser illumination are demonstrated. The optical devices of interest are S-bend, 1×2 optical power splitter (Y-branch), and 1×4 optical power splitter with simplified coherently-coupled (SCC) segments. The bend angles of these segments are designed as 0.5°, 1.5°, 2.5°, 3°, 2.5°, 1.5°, and 0.5° for the 1.55 μm wavelength. Simulated results show that with use of SCC structure, the device length is shortened and the transmission efficiency is enhanced as compared with those of the traditional bending structures. Using various numbers of laser shots, the coherent length is determined by the S-bend structure, and the split length is determined by the 1×2 optical power splitter. Based on the coherent length and the split length, a 1×4 optical power splitter is fabricated. The measured transmission efficiency is 81.86%, and the maximum imbalance is 0.81 dB, which agree quite well with the simulation results 85.6%, and 0.57 dB respectively.
Subjects
光波導
準分子雷射
光功率分離器
簡式同調耦合
Benzocyclobutene
BCB
Optical Waveguide
Optical Power Splitter Excimer Laser
KrF
Simplified Coherently-Coupled Segments
SCC
Type
thesis
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