Reliability Study of Self-Aligned Top-Gated a-IGZO TFTs by N2 and N2O Plasma Treatment

Journal

2025 International VLSI Symposium on Technology Systems and Applications VLSI Tsa 2025 Proceedings of Technical Papers

Series/Report No.

2025 International VLSI Symposium on Technology Systems and Applications VLSI Tsa 2025 Proceedings of Technical Papers

ISBN

[9798331543129]

Date Issued

2025-01-01

Author(s)

Liu Y.M.

Sung H.-M.

Wu Y.-S.

Ma R.-W.

Gracia J.

Fujiwara H.

Chen T.-L

Chou C.-H.

URI

Type

conference paper