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College of Engineering / 工學院
Industrial Engineering / 工業工程學研究所
Recipe-independent tool health indicator and fault prognosis
Details
Recipe-independent tool health indicator and fault prognosis
Journal
IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings
Pages
460-463
Date Issued
2006
Author(s)
Chen, A.
Blue, J.
Chou, T.-C.
ARGON CHEN
JAKEY BLUE
DOI
10.1109/ISSM.2006.4493136
URI
https://scholars.lib.ntu.edu.tw/handle/123456789/467251
URL
https://www.scopus.com/inward/record.uri?eid=2-s2.0-50249161186&doi=10.1109%2fISSM.2006.4493136&partnerID=40&md5=ea02b1c5a1db9ba445132b4c22cdf2f7
Type
conference paper
