Design of a tri-layer bottom anti-reflective coating for KrF, ArF and F2 lithographies
Journal
Microelectronic Engineering
Journal Volume
73-74
Pages
59-62
Date Issued
2004-06
Author(s)
Abstract
We report a novel tri-layer bottom antireflective coating (BARC) design based on hexamethyldisiloxane (HMDSO) films working simultaneously at 157, 193 and 248 nm wavelengths. The required optical constant for each layer can be tuned by varying the gas flow rate ratio of oxygen to HMDSO in an electron cyclotron resonance plasma enhanced chemical vapor deposition (ECR-PECVD) process. The swing effect in the resist is experimentally shown to be reduced significantly by adding this tri-layer BARC structure. © 2004 Elsevier B.V. All rights reserved.
Event(s)
Micro and Nano Engineering 2003
Other Subjects
Computational methods; Computer simulation; Cyclotron resonance; Excimer lasers; Matrix algebra; Plasma enhanced chemical vapor deposition; Problem solving; Reflection; Reflective coatings; Silicon; Substrates; Thin films; Ultraviolet radiation; Bottom antireflective coating (BARC); Flow rates; Hexamethyldisiloxane (HMDSO); Tunability; Photolithography
Type
conference paper