The Influence of Subwavelength Grating Profiles to Surface Plasmon Resonance: Development of Nanowriter Optical Head and Related Applications
Date Issued
2005
Date
2005
Author(s)
Chou, Pei-Ting
DOI
en-US
Abstract
Grating coupling is a major method to excite surface plasmon resonance; this thesis took the extraordinary transmission phenomenon first proposed by Ebbesen et al. as the starting point to study gratings of different materials and various profiles in order to understand the influence of these changes on surface plasmon resonance. It is anticipated to utilize parameters learned during the course of this research to facilitate the design of nanowriter optical head and other related applications.
In simulations, we use rigorous coupled wave analysis (RCWA) and finite difference time domain (FDTD) to calculate the reflection spectrum and electromagnetic mode of surface plasmons, both of which is coupled by using gratings. The surface plasmon dispersion curve and coupling efficiency under different grating profiles were successfully calculated. We consider the non-metal surface gratings as a homogeneous dielectric layer by using effective medium theory. For metal surface gratings, we found the surface plasmon resonance condition of gradient gratings is different to binary gratings, thus the coupling efficiency and band gap width of gratings under different grating depths will be different. The distribution of electromagnetic field under different wavelength of light will be different. More specifically, the coupling efficiencies and band gap width under different grating depth were found to be different. We can obtain the design criterion of optical head and other optical devices through the above simulations.
In experiments, we use electron beam lithography to make the gradient gratings, and produce metal and non-metal surface gratings with proper fabrication process. The fabrication process of nanowriter optical head was then detailed. We also take advantage of wet etching to manufacture the triangular nanoimprint mold with an attempt to reach the mass production goal of nanowriter optical head and other applications by using nanoimprint techniques.
Subjects
表面電漿
光柵
奈米直寫儀
surface plasmons
gratings
Nanowriter
Type
thesis
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