Composition Control of r.f.-Sputtered Ti50Ni40Cu10 Thin Films Using Optical Emission Spectroscopy

Resource

Thin Solid Films 365 (1): 61-66

Journal

Thin Solid Films

Journal Volume

365

Journal Issue

1

Pages

61-66

Date Issued

2000

Date

2000

Author(s)

Wu, S.K.

Chen, Y.S.

Chen, J.Z.

URI

Type

journal article

File(s)

Name

77.pdf

Size

337.85 KB

Format

Adobe PDF

Checksum

(MD5):e4311726762a6c9bdf84e422285641f5