Economic Analysis and Optimization of Tool Portfolio in Semiconductor Manufacturing

Resource

IEEE Transactions on Semiconductor Manufacturing 15 (4): 447-453

Journal

IEEE Transactions on Semiconductor Manufacturing

Journal Volume

15

Journal Issue

4

Pages

447-453

Date Issued

2002

Date

2002

Author(s)

Wu, Chuan-Shun

URI

Type

journal article

File(s)

Name

03.pdf

Size

245.67 KB

Format

Adobe PDF

Checksum

(MD5):f99867221673c101e32250d736045a8f