Atomic layer etchings of transition metal dichalcogenides with post healing procedures: Equivalent selective etching of 2D crystal hetero-structures

Journal

2D Materials

Journal Volume

4

Journal Issue

3

Date Issued

2017

Author(s)

Chen, K.-C.

Chu, T.-W.

Wu, C.-R.

Lee, S.-C.

Lin, S.-Y.

DOI

10.1088/2053-1583/aa75a7

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/498821

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-85029228509&doi=10.1088%2f2053-1583%2faa75a7&partnerID=40&md5=de4940775e174614cd4d40c66ed558cf

Type

journal article