Design ULVLED stepper with programmable reflective display panel as mask for multiple process wafer
Journal
Proceedings of SPIE - The International Society for Optical Engineering
Journal Volume
11613
Date Issued
2021
Author(s)
Huang J.-W
Abstract
In making sensors require multiple processing by using different masks to accomplish, it needs reload and multiple aligning for a wafer in order to make a functional wafer, thus, the consuming for making mask are wasted, and used lamps toxic. In the study, a ULVLED stepper with Programmable LCoS or DLP as mask for multiple process wafer is proposed. By a programmable ultraviolet light-emitting diode (UVLED) array with a collimated lens as a transfer lens forms uniform source, to expose programmable LCoS or DLP as mask by using a 1 to 1 lithographic lens. Sensors and optical binary lens are easily made. ? 2021 SPIE.
Subjects
Binary lens
Programmable reflective LCoS
Programmable UVLED array
Sensors in wafer
ULVLED stepper
Display devices
Collimated lens
Multiple process
Multiple processing
Reflective display
Ultraviolet light-emitting diodes
Lenses
Type
conference paper