Optimization of material and fabrication process for micro fabrication by Two-Photon Polymerization
Date Issued
2014
Date
2014
Author(s)
Lee, Wan-Jou
Abstract
This thesis studies the optimization of materials and fabrication process for micro fabrication by Two-Photon Polymerization (TPP). The established TPP fabrication system uses a low-cost 130kHz high repetition rate Nd:YAG laser. In addition, an optical microscope with two different objective lenses is required. One objective lens has magnification of 100 times (100x) with numerical aperture (NA) of 1.3, the other is 50x-NA0.8. Two different materials, Photomer 3015 and ORMOCOMP are used in TPP production. First, a series of lines are fabricated with various manufacturing parameters under different combination of material and objective lens. From measurement of high resolution scanning electronic microscope (SEM) images of these lines, the lateral and longitudinal resolutions of lines can be obtained. The characterization of TPP process obtained from fitting of line fabrication results can be compared with simulation result obtained from PSF Lab software. Then, based on the information provided from the experiment of line fabrication, several micro products are fabricated successfully. Micro lenses are fabricated with different combination of materials and objective lenses, and they are able to focus the light and image objects. Finally, a 13x13 micro lens array (MLA) with size 1.3mm x 1.3mm are fabricated. Furthermore, micro grating, micro Taipei 101, and micro horse are also fabricated with good quality.
Subjects
雙光子聚合
雙光子吸收
微製造
微透鏡
微光柵
Type
thesis
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