Flip-chip bonded MEMS capacitor applied on tuning superconductive resonator

Resource

MEMS 2008. IEEE 21st International Conference on Micro Electro Mechanical Systems, 1004-1007

Journal

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Pages

1004-1007

Date Issued

2008

Author(s)

Chen, Yi-Jie

Kao, Cheng-Kai

Chung, Sheng-Yuan

DOI

URI

SDGs

[SDGs]SDG7

Type

conference paper

File(s)

Name

57.pdf

Size

23.44 KB

Format

Adobe PDF

Checksum

(MD5):59f0179941d34c7797aaff651018827f