Family-based Scheduling Rule of a Sequence Dependent Wafer Fabrication System

Resource

IEEE Transactions on Semiconductor Manufacturing 16 (1): 15—25

Journal

IEEE Transactions on Semiconductor Manufacturing

Journal Volume

16

Journal Issue

1

Pages

-

Date Issued

2003

Date

2003

Author(s)

Chern, C.C.

Liu, Y.L.

URI

http://ntur.lib.ntu.edu.tw//handle/246246/84998

File(s)

Name

4.pdf

Size

595.24 KB

Format

Adobe PDF

Checksum

(MD5):9e4344e63976ac8e5f2257fc06f0c9cb