Low-dielectric constant FLARE 2.0 films for bottom antireflective coating layers in KrF lithography

Journal

Solid-State Electronics

Journal Volume

46

Journal Issue

8

Pages

1127-1131

Date Issued

2002

Author(s)

Chen, H.L.

Cheng, H.C.

Li, M.Y.

Ko, F.H.

Huang, T.Y.

Chu, T.C.

DOI

10.1016/S0038-1101(02)00054-0

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/491380

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-0036680403&doi=10.1016%2fS0038-1101%2802%2900054-0&partnerID=40&md5=d56370c0cf1002bf517e51ca838422ee

Type

journal article