Synthesis and characterization of ruthenium complexes with two fluorinated amino alkoxide chelates. The quest to design suitable MOCVD source reagents

Resource

Chemistry of Materials 15 (12): 2454-2462

Journal

Chemistry of Materials

Journal Volume

15

Journal Issue

12

Pages

2454-2462

Date Issued

2003

Author(s)

Lai, Y.-H.

Chou, T.-Y.

Song, Y.-H.

Liu, C.-S.

Chi, Y.

Carty, A.J.

Lee, G.-H.

DOI

URI

Type

journal article

File(s)

Name

353.pdf

Size

352.09 KB

Format

Adobe PDF

Checksum

(MD5):926b5f109b39862bdad0dd10ffc3c29d