Application of Slanted Finger Interdigital Transducer SAW Devices to Ultraviolet Array Photodetectors
Date Issued
2006
Date
2006
Author(s)
Yu, Jhih-Ming
DOI
zh-TW
Abstract
In recent years, surface acoustic wave (SAW) devices are commonly used as filters, resonators, sensors, etc.. SAW devices offer many attractive advantages, for example, they are passive and small by MEMS fabrication. They are highly sensitive and output signal has the form of RF signal allowing the combination with the wireless sensor. Sometimes, we must use piezoelectric materials with high coupling coefficients or layered structures in order to have better performance. Other interactions arise in SAW devices, such as temperature, and acoustoelectric effect. In this paper, we analyze the influence of UV light effect on the frequency characteristics of SAW devices, and these devices are used as a photodetector.
In general, velocity and attenuation of SAW devices are affected by acoustoelectric interations and/or mass loading effect. In this research, the interactions of acoustoelectric effect with piezoelectric fields is investigated. The substrate used in the SAW device is lithium niobate (LiNbO3) crystal which has high acoustic velocity and large electromechanical coupling coefficient, so that the SAW device used as the photodetector is sensitive to the intensity of UV light. The wavelength of UV light is between and , and a intensity in the order of is easily detected from the SAW devices. The photodetector is designed as the array photo sensors in SFIT SAW devices. The array sensors are used to analyze the distribution of the UV light field and the characteristics of sensors are discussed.
Subjects
寬頻
表面聲波元件
氧化鋅
陣列
光感測器
紫外光
SFIT
SAW
ZnO
Array
sensor
photodetector
UV
Type
thesis
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