Development of a low-cost micro-CMM for 3D micro/nano measurements
Resource
MEASUREMENT SCIENCE & TECHNOLOGY,17(3),524-532.
Journal
MEASUREMENT SCIENCE & TECHNOLOGY
Journal Volume
17
Journal Issue
3
Pages
524-532
Date Issued
2006
Date
2006
Author(s)
Fan, K. C.
Fei, Y. T.
Yu, X. F.
Chen, Y. J.
Wang, W. L.
Chen, F.
Liu, Y. S.
Type
journal article