Modelling on dressing effects in chemical mechanical polishing with diamond dressers

Journal

International Journal of Abrasive Technology

Journal Volume

3

Journal Issue

1

Pages

1-10

Date Issued

2010

Author(s)

Chen, K.-R.

Young, H.-T.

DOI

10.1504/IJAT.2010.032458

URI

http://www.scopus.com/inward/record.url?eid=2-s2.0-78651575751&partnerID=MN8TOARS

http://scholars.lib.ntu.edu.tw/handle/123456789/356881

Type

journal article