A new process for liquid phase deposition of silicon oxide and its application in amorphous silicon thin film transisitor

Journal

1994 International Electron Devices and Materials Symposium, EDMS 1994

Date Issued

1994

Author(s)

Chou, J.-S.

Chen, M.-S.

DOI

10.1109/EDMS.1994.863882

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/498832

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-85063569726&doi=10.1109%2fEDMS.1994.863882&partnerID=40&md5=08fe48224348e648a4c40f398272148d

Type

conference paper