Development of a multiple-microhole aerostatic air bearing system
Resource
JOURNAL OF MICROMECHANICS & MICROENGINEERING 12,636-643
Journal
JOURNAL OF MICROMECHANICS & MICROENGINEERING 12
Pages
636-643
Date Issued
2002
Date
2002
Author(s)
Fan, Kuang-Chao
Ho, Chi-Chung
Mou, Jong-I
DOI
246246/2006111501211870
Abstract
New types of aerostatic air bearing & linear slide systems have been developed. The prototype of a multiple-microhole, instead of a porous-type, air bearing was developed & the surface roughness was improved by finished process. Instead of the conventional drilling process, the air bearing pads were fabricated by using microfabrication technology in this research. The spectral element method was employed to simulate the pressure distribution of air bearing & a comparison was made with experimental results. A granite straight edge was used as linear slide to guide the moving table that was supported by the developed air bearing system. A laser interferometer system was used to assess the performance of the stage.
Type
journal article
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